Normally the vertical cyclic type AS/RS is used to store wafer cassette filled with nitrogen, however, its storage space is limited. To meet the demand for more storage space, Mirle developed an AS/RS filled with nitrogen for wafer-cassette. By installing a panel on each side of a storage unit in the AS/RS, an airtight partition is formed. Each partition is filled with nitrogen and monitored. Each partition has dual gates at its accesses to conveyors and each gate is a fast rolling door. When one gate is open, the other one is closed. Therefore, the nitrogen leakage can be reduced. With this system, the storage space can be significantly increased, the cost can be reduced and the warehouse management efficiency can be improved.

Applicable Industries:

Electronics, Semiconductor, Solar energy

Features:

        · Create plenty of storage space
        · Increase the space utilization rate
        · Improve the efficiency of warehouse management
        · Automatic Nitrogen filling and monitoring system